JPH0463039U - - Google Patents
Info
- Publication number
- JPH0463039U JPH0463039U JP10668690U JP10668690U JPH0463039U JP H0463039 U JPH0463039 U JP H0463039U JP 10668690 U JP10668690 U JP 10668690U JP 10668690 U JP10668690 U JP 10668690U JP H0463039 U JPH0463039 U JP H0463039U
- Authority
- JP
- Japan
- Prior art keywords
- strain
- force sensor
- generating body
- silicon single
- crystal plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000004088 simulation Methods 0.000 description 2
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10668690U JPH0463039U (en]) | 1990-10-09 | 1990-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10668690U JPH0463039U (en]) | 1990-10-09 | 1990-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0463039U true JPH0463039U (en]) | 1992-05-29 |
Family
ID=31852874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10668690U Pending JPH0463039U (en]) | 1990-10-09 | 1990-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0463039U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63242694A (ja) * | 1987-03-31 | 1988-10-07 | 三菱電機株式会社 | 半導体装置カ−ド |
| JPH02146133A (ja) * | 1988-11-28 | 1990-06-05 | Fujitsu Ltd | 光磁気ディスク媒体 |
-
1990
- 1990-10-09 JP JP10668690U patent/JPH0463039U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63242694A (ja) * | 1987-03-31 | 1988-10-07 | 三菱電機株式会社 | 半導体装置カ−ド |
| JPH02146133A (ja) * | 1988-11-28 | 1990-06-05 | Fujitsu Ltd | 光磁気ディスク媒体 |